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Cambridge cf4 Analyser

Cambridge cf4 Analyser

Feb 26, 2011Anisotropie RIE etching of Tungsten (W) in a low voltage CF 4 or SF 6 plasma while achieving features as small as 0.50 μm is demonstrated using Titanium (Ti) as an etch mask. For reasons of reliability and tolerance to high temperature processing techniques, W can be a desirable contact metal in microelectronics fabrication.Author: T. R. Fullowan, F. Ren, S. J. Pearton, G. E. Mahoney, R. L. KostelakPublish Year: 1991Carbon tetrafluoride | CF4 - PubChem

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