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tif sf6 o2 device

tif sf6 o2 device

Reactive Ion Etching in SF6 Gas Mixtures R. Pinto, K. V. Ramanathan, 1 and R. S. Babu Solid State Electronics Group, Tata Institute of Fundamental Research, Bombay 400005, India ABSTRACT Reactive ion etching of crystalline silicon, polysilicon, SIO2, and Si3N4 has been studied in a …Cited by: 52Publish Year: 1987Author: R. Pinto, K. V. Ramanathan, R. S. BabuLeakSpy SF6 | DILO GmbH

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